Reply to post: Re: EUV is certainly not dead

Hand in hand, TSMC, ARM head to 7nm server chip land

imanidiot Silver badge

Re: EUV is certainly not dead

I know its been a while but maybe you still read this. Throughput is currently a company secret but lets say sufficient for proto run production, with full production speeds in the pipeline very soon. Wafer size is standard 300mm (noone is planning a 450 fab so no point in building a machine for 450mm. Logistics alone at that size become a challenge). Powerconsumption is again a company secret but relatively high for the actual EUV light power actually reaching the wafers. (kWatts in hundred something Watts out.)

Sorry I can't be more specific. NDAs are a pain.

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