Re: EUV is certainly not dead
I know its been a while but maybe you still read this. Throughput is currently a company secret but lets say sufficient for proto run production, with full production speeds in the pipeline very soon. Wafer size is standard 300mm (noone is planning a 450 fab so no point in building a machine for 450mm. Logistics alone at that size become a challenge). Powerconsumption is again a company secret but relatively high for the actual EUV light power actually reaching the wafers. (kWatts in hundred something Watts out.)
Sorry I can't be more specific. NDAs are a pain.